REMOTE PARTICLE SENSOR (Pump Out)

 



environment level
Complies with FS-209E CLASS 10~100,000
ISO CLASS 3~8


industry
&
area
Applications of real-time monitoring for multiple industries. ex: Semi-Conductor, panel, Optoelectronics(TP, LED, Solar), Encapsulation test etc.

 



environment level
Complies with FS-209E CLASS 100~10,000
EU/GMP or PIC/S GRADE A~B


industry
&
area
Application for cleaning room of biotech & pharma industries. Complies with EU/GMP or PIC/S GRADE A~B

 



environment level
Compies with FS-209E CLASS 1~1000
ISO CLASS 1~5


industry
&
area
Applications of real-time monitoring for multiple industries. ex: Semi-Conductor, panel, Optoelectronics(TP, LED, Solar), Encapsulation test etc.