environment level | Complies with FS-209E CLASS 10~100,000 ISO CLASS 3~8 |
industry & area |
Applications of real-time monitoring for multiple industries. ex: Semi-Conductor, panel, Optoelectronics(TP, LED, Solar), Encapsulation test etc. |
REMOTE PARTICLE SENSOR (Pump Out)
AEROTRAK® 7201 & 7301 & 7501
AEROTRAK® 7201 & 7301 & 7501
DETAIL